| 000 | 00437nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230130s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a9789811509438 | ||
| 100 | _aJingsong Wei | ||
| 245 | 0 | _aLaser Heat-Mode Lithography | |
| 250 | _a1st ed. 2019 | ||
| 260 |
_bSpringer Nature Singapore _c2019 |
||
| 440 | _aSpringer Series in Materials Science | ||
| 650 | _aPhysics and Astronomy | ||
| 856 | _uhttps://doi.org/10.1007/978-981-15-0943-8 | ||
| 999 |
_c18605 _d18605 |
||