000			00467nam a2200145Ia 4500
008			230130s9999||||xx |||||||||||||| ||und||
020			_a9783642105234
100			_aKoji Sugioka, Michel Meunier, Alberto Piqué
245		0	_aLaser Precision Microfabrication
250			_a2010
260			_bSpringer Berlin Heidelberg _c2010
440			_aSpringer Series in Materials Science
650			_aPhysics and Astronomy
856			_uhttps://doi.org/10.1007/978-3-642-10523-4
999			_c17171 _d17171