000			00415nam a2200145Ia 4500
008			230130s9999||||xx |||||||||||||| ||und||
020			_a9783540313724
100			_aHiroo Ukita
245		0	_aMicromechanical Photonics
250			_a2006
260			_bSpringer Berlin Heidelberg _c2006
440			_aMicrotechnology and MEMS
650			_aPhysics and Astronomy
856			_uhttps://doi.org/10.1007/978-3-540-31372-4
999			_c17019 _d17019