000 00379nam a2200133Ia 4500
008 230130s9999||||xx |||||||||||||| ||und||
020 _a9783540266679
100 _aDirk Basting, Gerd Marowsky
245 0 _aExcimer Laser Technology
250 _a2005
260 _bSpringer Berlin Heidelberg
_c2005
650 _aPhysics and Astronomy
856 _uhttps://doi.org/10.1007/b137894
999 _c16773
_d16773